- 专利标题: Turning tool for grooving polishing pad, apparatus and method of producing polishing pad using the tool, and polishing pad produced by using the tool
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申请号: US11360441申请日: 2006-02-23
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公开(公告)号: US20060137170A1公开(公告)日: 2006-06-29
- 发明人: Tatsutoshi Suzuki
- 申请人: Tatsutoshi Suzuki
- 申请人地址: JP Yokkaichi-shi
- 专利权人: TOHO ENGINEERING KABUSHIKI KAISHA
- 当前专利权人: TOHO ENGINEERING KABUSHIKI KAISHA
- 当前专利权人地址: JP Yokkaichi-shi
- 优先权: JP11-194646 19990708
- 主分类号: B23P13/04
- IPC分类号: B23P13/04
摘要:
Disclosed is a turning tool for cutting circumferential grooves into a surface of a polishing pad formed of a resin material and utilized for polishing semiconductor devices. The turning tool comprising a cutting part arranged to have a tooth width within a range of 0.005-1.0 mm, a wedge angle within a range of 15-35 degrees, and a front clearance angle within a range of 65-45 degrees. A polishing pad effectively formed by using the turning tool, and an apparatus and a method of producing such a polishing pad by utilizing the turning tool are also disclosed.
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