发明申请
- 专利标题: Sensing apparatus
- 专利标题(中): 传感装置
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申请号: US11263834申请日: 2005-11-02
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公开(公告)号: US20060137453A1公开(公告)日: 2006-06-29
- 发明人: Tsung-Ying Wu , Tai-Kang Shing
- 申请人: Tsung-Ying Wu , Tai-Kang Shing
- 专利权人: DELTA ELECTRONICS, INC.
- 当前专利权人: DELTA ELECTRONICS, INC.
- 优先权: TW93140886 20041228
- 主分类号: G01H13/00
- IPC分类号: G01H13/00
摘要:
A sensing apparatus utilizing film bulk acoustic resonators (FBARs). The film bulk acoustic resonator has a bulk acoustic wave velocity (Vb) and a corresponding resonant frequency (f). When the FBAR is subjected to a force such as acceleration, g-force or an air pressure, the bulk acoustic wave velocity changes to obtain a frequency downshift (Δf) in response to deformation caused by the force. A magnitude of the force is then obtained by calculating the frequency downshift (Δf).
信息查询
IPC分类:
G | 物理 |
G01 | 测量;测试 |
G01H | 机械振动或超声波、声波或次声波的测量 |
G01H13/00 | 测量谐振(共振)频率 |