发明申请
- 专利标题: Method for determining the focal position of a laser beam
- 专利标题(中): 确定激光束焦点位置的方法
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申请号: US10536037申请日: 2003-05-30
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公开(公告)号: US20060138111A1公开(公告)日: 2006-06-29
- 发明人: Dirk Hillebrand , Hans Mayer , Christian Overmann
- 申请人: Dirk Hillebrand , Hans Mayer , Christian Overmann
- 申请人地址: DE Munich 80333
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DE Munich 80333
- 优先权: DE10255628.8 20021128
- 国际申请: PCT/DE03/01780 WO 20030530
- 主分类号: B23K26/03
- IPC分类号: B23K26/03
摘要:
Disclosed is a method for determining the focal position of a laser beam, according to which a plurality of linear patterns are first created on the surface of a sample substrate by the laser beam, the distance between the laser and the substrate surface being gradually modified. The width of the individual lines is then measured and the line having the smallest width is determined. The vertical setting associated with the smallest line width is evaluated and stored as the focal setting of the machine.
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