发明申请
US20060138111A1 Method for determining the focal position of a laser beam 审中-公开
确定激光束焦点位置的方法

Method for determining the focal position of a laser beam
摘要:
Disclosed is a method for determining the focal position of a laser beam, according to which a plurality of linear patterns are first created on the surface of a sample substrate by the laser beam, the distance between the laser and the substrate surface being gradually modified. The width of the individual lines is then measured and the line having the smallest width is determined. The vertical setting associated with the smallest line width is evaluated and stored as the focal setting of the machine.
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