发明申请
- 专利标题: Semiconductor device and method for fabricating the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US11301992申请日: 2005-12-12
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公开(公告)号: US20060145293A1公开(公告)日: 2006-07-06
- 发明人: Jin-Youn Cho
- 申请人: Jin-Youn Cho
- 专利权人: MagnaChip Semiconductor, Ltd.
- 当前专利权人: MagnaChip Semiconductor, Ltd.
- 优先权: KR2004-0116971 20041230
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
A semiconductor device and a method for fabricating the same are provided. The method includes: forming a contact plug passing through an inter-layer insulation layer; sequentially forming a lower electrode layer, a dielectric layer and an upper electrode layer on the inter-layer insulation layer; patterning the upper electrode layer; patterning the dielectric layer and the lower electrode layer, thereby obtaining a capacitor including an upper electrode, a patterned dielectric layer and a lower electrode; and sequentially forming a first metal interconnection line connected with the contact plug and second metal interconnection lines connected with the capacitor.
公开/授权文献
- US07683415B2 Semiconductor device and method for fabricating the same 公开/授权日:2010-03-23