发明申请
- 专利标题: Local sonos-type nonvolatile memory device and method of manufacturing the same
- 专利标题(中): 本地声波型非易失性存储器件及其制造方法
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申请号: US11365147申请日: 2006-03-01
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公开(公告)号: US20060148172A1公开(公告)日: 2006-07-06
- 发明人: Yong-suk Choi , Seung-beom Yoon , Seong-gyun Kim
- 申请人: Yong-suk Choi , Seung-beom Yoon , Seong-gyun Kim
- 优先权: KR03-63355 20030909
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
Provided are a local SONOS-type memory device and a method of manufacturing the same. The device includes a gate oxide layer formed on a silicon substrate; a conductive spacer and a dummy spacer, which are formed on the gate oxide layer and separated apart from each other, the conductive spacer and the dummy spacer having round surfaces that face outward; a pair of insulating spacers formed on a sidewall of the conductive spacer and a sidewall of the dummy spacer which face each other; an ONO layer formed in a self-aligned manner between the pair of insulating spacers; a conductive layer formed on the ONO layer in a self-aligned manner between the pair of insulating spacers; and source and drain regions formed in the silicon substrate outside the conductive spacer and the dummy spacer.
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