发明申请
- 专利标题: Electrode structures and method to form electrode structures that minimize electrode work function variation
- 专利标题(中): 电极结构和形成极化电极功能变化的电极结构的方法
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申请号: US11368455申请日: 2006-03-07
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公开(公告)号: US20060148248A1公开(公告)日: 2006-07-06
- 发明人: Joseph Brooks , John Moore
- 申请人: Joseph Brooks , John Moore
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
Electrode structures, variable resistance memory devices, and methods of making the same, which minimize electrode work function variation. Methods of forming an electrode having a minimized work function variation include methods of eliminating concentric circles of material having different work functions. Exemplary electrodes include electrode structures having concentric circles of materials with different work functions, wherein this difference in workfunction has been minimized by recessing these materials within an opening in a dielectric and forming a third conductor, having a uniform work function, over said recessed materials.
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