发明申请
- 专利标题: Bonding system having stress control
- 专利标题(中): 具有应力控制的接合系统
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申请号: US11031276申请日: 2005-01-07
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公开(公告)号: US20060154443A1公开(公告)日: 2006-07-13
- 发明人: Robert Horning
- 申请人: Robert Horning
- 主分类号: H01L21/477
- IPC分类号: H01L21/477
摘要:
An approach where items of different temperatures are bonded to each other such that upon cooling down they contract in size resulting in zero residual stress between the bonded items at an ambient temperature. If materials of the bonded items have different thermal expansion coefficients and the items are put together at different bonding temperatures, then they may have insignificant residual stress upon cooling down to the ambient temperature (e.g., room temperature) because the different ranges of the temperature drops compensate for the different contractions.
公开/授权文献
- US07691723B2 Bonding system having stress control 公开/授权日:2010-04-06
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