发明申请
US20060154443A1 Bonding system having stress control 失效
具有应力控制的接合系统

  • 专利标题: Bonding system having stress control
  • 专利标题(中): 具有应力控制的接合系统
  • 申请号: US11031276
    申请日: 2005-01-07
  • 公开(公告)号: US20060154443A1
    公开(公告)日: 2006-07-13
  • 发明人: Robert Horning
  • 申请人: Robert Horning
  • 主分类号: H01L21/477
  • IPC分类号: H01L21/477
Bonding system having stress control
摘要:
An approach where items of different temperatures are bonded to each other such that upon cooling down they contract in size resulting in zero residual stress between the bonded items at an ambient temperature. If materials of the bonded items have different thermal expansion coefficients and the items are put together at different bonding temperatures, then they may have insignificant residual stress upon cooling down to the ambient temperature (e.g., room temperature) because the different ranges of the temperature drops compensate for the different contractions.
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