The model-based method tests compliance of production devices with the performance specifications of a device design. The production devices are manufactured in accordance with the device design by a manufacturing process. In the method, a simple model form based on the device design and the performance specifications is developed, a stimulus for testing the production devices is specified and each production device is tested. The model form has a basis function and model form parameters for the basis function. The model form parameters are dependent on the manufacturing process and differ in value among the production devices. A production device is tested by measuring the response of the production device to the stimulus; extracting, using the model form, the values of the model form parameters for the production device from the measured response and the stimulus; and checking compliance of the production device with the performance specifications using the extracted values of the model form parameters.