发明申请
- 专利标题: Light-emitting semicoductor device and a method of manufacturing it
- 专利标题(中): 发光半导体器件及其制造方法
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申请号: US10564416申请日: 2004-08-20
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公开(公告)号: US20060163585A1公开(公告)日: 2006-07-27
- 发明人: Masanobu Ando , Masahito Nakai , Toshiya Uemura , Masaaki Nakayama
- 申请人: Masanobu Ando , Masahito Nakai , Toshiya Uemura , Masaaki Nakayama
- 优先权: JP2003-297682 20030821
- 国际申请: PCT/JP04/12340 WO 20040820
- 主分类号: H01L33/00
- IPC分类号: H01L33/00
摘要:
In layer structure 20 of a semiconductor laser of a surface emitting type, 21 and 24 represent an n-type contact layer made of n-type GaN and a p-layer made of p-type AlGaN, respectively. In the laser, an n-type DBR layer 22 made of n-type InGaN and a DBR layer 25 made of dielectric are formed on and below a InGaN active layer 23, respectively, each of which forms a reflection surface vertical to the z axis. By forming a reflection surface vertical to the z axis at each of on and above the active layer 23, a resonator is obtained. Here optical distance between two reflection facets are arranged to an integral multiple of half a oscillation wavelength. Consequently, the present invention enables to produce a semiconductor laser of a surface emitting type easier by far compared with a conventional invention.
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