发明申请
US20060169972A1 VERTICAL CARBON NANOTUBE TRANSISTOR INTEGRATION 有权
垂直碳纳米管晶体管集成

VERTICAL CARBON NANOTUBE TRANSISTOR INTEGRATION
摘要:
A hybrid semiconductor structure which includes a horizontal semiconductor device and a vertical carbon nanotube transistor, where the vertical carbon nanotube transistor and the horizontal semiconductor device have at least one shared node is provided. The at least one shared node can include, for example, a drain, source or gate electrode of a FET, or an emitter, collector, or base of a bipolar transistor. A method of forming the inventive hybrid semiconductor structure having at least one shared node between the vertical carbon nanotube transistor and the horizontal semiconductor device is also provided.
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