发明申请
US20060170736A1 Piezoelectric element, inkjet head, angular velocity sensor, production methods for these and inkject recording device
有权
压电元件，喷墨头，角速度传感器，这些和喷墨记录装置的生产方法
- 专利标题： Piezoelectric element, inkjet head, angular velocity sensor, production methods for these and inkject recording device
- 专利标题（中）： 压电元件，喷墨头，角速度传感器，这些和喷墨记录装置的生产方法
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申请号： US10560001申请日： 2005-02-21
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公开(公告)号： US20060170736A1公开(公告)日： 2006-08-03
- 发明人: Atsushi Tomozawa , Eiji Fujii , Hideo Torii
- 申请人： Atsushi Tomozawa , Eiji Fujii , Hideo Torii
- 优先权： JP2004-062928 20040503; JP2004-062978 20040503
- 国际申请： PCT/JP05/02739 WO 20050221
- 主分类号： B41J2/045
- IPC分类号： B41J2/045
摘要：
A piezoelectric element includes two electrode films and a layered piezoelectric film which is sandwiched between the electrode films and made of two thin piezoelectric films each having preferred orientation along the (111) plane. The two thin piezoelectric films are aggregates of columnar grains, respectively, which are continuously linked to each other. The columnar grains of the second thin piezoelectric film have a larger average cross-sectional diameter than the columnar grains of the first thin piezoelectric film. The ratio of the thickness of the layered piezoelectric film to the average cross-sectional diameter of the columnar grains of the second thin piezoelectric film is 20 to 60 inclusive.
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