发明申请
- 专利标题： Chucking system for nano-manufacturing
- 专利标题（中）： 用于纳米制造的卡盘系统
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申请号： US11047428申请日： 2005-01-31
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公开(公告)号： US20060172031A1公开(公告)日： 2006-08-03
- 发明人: Daniel Babbs , Byung-Jin Choi , Anshuman Cherala
- 申请人： Daniel Babbs , Byung-Jin Choi , Anshuman Cherala
- 专利权人： Molecular Imprints, Inc.
- 当前专利权人： Molecular Imprints, Inc.
- 主分类号： B28B11/08
- IPC分类号： B28B11/08
摘要：
The present invention is directed towards a chucking system, including, inter alia, a body having a surface with a pin extending therefrom having a throughway defined therein, and a land surrounding the protrusions defining a channel between the pin and the land. In a further embodiment, the body comprises a plurality of protrusions.
公开/授权文献
- US07798801B2 Chucking system for nano-manufacturing 公开/授权日：2010-09-21
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