发明申请
- 专利标题: Copper bonding wire for semiconductor packaging
- 专利标题(中): 用于半导体封装的铜接合线
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申请号: US11252646申请日: 2005-10-18
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公开(公告)号: US20060186544A1公开(公告)日: 2006-08-24
- 发明人: Sung-Joon Won , Oh Kwon , Sung Lee
- 申请人: Sung-Joon Won , Oh Kwon , Sung Lee
- 申请人地址: KR Yongin-city
- 专利权人: MK ELECTRON CO., LTD.
- 当前专利权人: MK ELECTRON CO., LTD.
- 当前专利权人地址: KR Yongin-city
- 优先权: KR10-2005-0013511 20050218
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
Provided is a copper bonding wire formed of a high purity copper of 99.999% or more including at least one of P and Nb within a range between 20 wt ppm and 100 wt ppm and at least one of Zr, Sn, Be, Nd, Sc, Ga, Fr, and Ra within a range between 1 wt ppm and 100 wt ppm. Here, a total content of the added elements is restricted within a range between 20 wt ppm and 200 wt ppm, and a residual amount of the copper bonding wire is a high purity copper of 99.98% or more. As a result, metal squeeze out and chip cratering can be reduced in a general semiconductor chip and a low dielectric semiconductor chip. Also, a short tail of the copper bonding wire occurring during bonding of the copper bonding wire to a lead finger can be reduced.
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