发明申请
US20060186560A1 Back-illuminated imaging device and method of fabricating same 有权
背照式成像装置及其制造方法

Back-illuminated imaging device and method of fabricating same
摘要:
A method for fabricating a back-illuminated semiconductor imaging device on a thin semiconductor-on-insulator substrate, and resulting imaging device. Resulting device has a monotonically varying doping profile which provides a desired electric field and eliminates a dead band proximate to the backside surface.
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