发明申请
- 专利标题: Back-illuminated imaging device and method of fabricating same
- 专利标题(中): 背照式成像装置及其制造方法
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申请号: US11350546申请日: 2006-02-09
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公开(公告)号: US20060186560A1公开(公告)日: 2006-08-24
- 发明人: Pradyumna Swain , Mahalingam Bhaskaran
- 申请人: Pradyumna Swain , Mahalingam Bhaskaran
- 主分类号: H01L31/00
- IPC分类号: H01L31/00 ; H01L21/00
摘要:
A method for fabricating a back-illuminated semiconductor imaging device on a thin semiconductor-on-insulator substrate, and resulting imaging device. Resulting device has a monotonically varying doping profile which provides a desired electric field and eliminates a dead band proximate to the backside surface.
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