发明申请
- 专利标题： Process for producing probe carrier and apparatus thereof
- 专利标题（中）： 探针载体的制造方法及其装置
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申请号： US11413177申请日： 2006-04-28
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公开(公告)号： US20060188647A1公开(公告)日： 2006-08-24
- 发明人: Yuji Tsuruoka
- 申请人： Yuji Tsuruoka
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 优先权： JP2001-087955 20010326; JP2001-087954 20010326
- 主分类号： C23C16/52
- IPC分类号： C23C16/52 ; B05C11/00
摘要：
A production apparatus, for producing a probe array,comprises a liquid discharging device for discharging a liquid containing a probe capable of being specifically bonded to a target substance in order to form a spot on the carrier, a detector for detecting whether the spot is formed or not by observing a surface state on the carrier, and a controller for controlling the liquid discharge device to again discharge the liquid to form the spot on the carrier if the detector detects that the spot has not been formed on the carrier.
公开/授权文献
- US07993605B2 Process for producing probe carrier and apparatus thereof 公开/授权日：2011-08-09
信息查询
IPC分类:
