发明申请
- 专利标题： Film-bulk acoustic wave resonator with motion plate
- 专利标题（中）： 具有运动板的膜 - 体声波谐振器
-
申请号： US11073345申请日： 2005-03-04
-
公开(公告)号： US20060197411A1公开(公告)日： 2006-09-07
- 发明人: Storrs Hoen , Mark Unkrich , William Trutna , John Larson , Richard Ruby , Graham Flower , Annette Grot
- 申请人： Storrs Hoen , Mark Unkrich , William Trutna , John Larson , Richard Ruby , Graham Flower , Annette Grot
- 主分类号： H01L41/04
- IPC分类号： H01L41/04
摘要：
An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.
公开/授权文献
信息查询
IPC分类:
