发明申请
US20060199110A1 Method of making an address plate 失效
制作地址栏的方法

  • 专利标题: Method of making an address plate
  • 专利标题(中): 制作地址栏的方法
  • 申请号: US11365049
    申请日: 2006-03-01
  • 公开(公告)号: US20060199110A1
    公开(公告)日: 2006-09-07
  • 发明人: John FysonChristopher Rider
  • 申请人: John FysonChristopher Rider
  • 优先权: GB0504265.0 20050302
  • 主分类号: G03F7/00
  • IPC分类号: G03F7/00
Method of making an address plate
摘要:
A method of producing an address plate comprising the steps of, coating a layer of conducting inorganic material onto a substrate, coating a layer of photoresist above this layer of conductive material and curing this layer, exposing, through a mask, the desired pattern of the conductors onto the layer of photoresist, developing the photoresist and etching the layer of the conductive material and coating the resulting etched layer with a layer of dielectric material. A further layer of photoresist is then applied, the thickness of this layer being equal to the desired height of a relief pattern, curing the further layer of photoresist, exposing, through a second mask, the desired structure of the relief pattern onto the layer of photoresist, developing the photoresist and allowing the layer to dry. This results in spacers raised above the layer of dielectric material.
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