Triaxial acceleration sensor module and method of manufacturing the same
摘要:
A triaxial acceleration sensor module 100 includes: a hollow housing 30 provided with a partition plate 31 having a through-hole 32; a triaxial acceleration sensor 1 provided inside the housing 30; and a sensor driving IC 40 for driving the triaxial acceleration sensor 1. The triaxial acceleration sensor 1 includes: a frame 23; a weight member 22 provided inside the frame 23; a weight member supporting portion 15 for supporting the weight member 22 in a freely suspended manner; and a plurality of flexible beams each having piezo resistance elements 13 thereon. In the triaxial acceleration sensor module 100, the through-hole 32 has a size through which the triaxial acceleration sensor 1 can pass. Further, the triaxial acceleration sensor 1 is directly bonded to the sensor driving IC 40 via the through-hole 32, and the sensor driving IC 40 is bonded to the partition plate 31 of the housing 30.
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