发明申请
- 专利标题: Method and apparatus for fabricating nanoscale structures
- 专利标题(中): 制造纳米结构的方法和装置
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申请号: US10547148申请日: 2004-03-01
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公开(公告)号: US20060205109A1公开(公告)日: 2006-09-14
- 发明人: David Cox , Roy Forrest , Sembukutiarachilage Silva
- 申请人: David Cox , Roy Forrest , Sembukutiarachilage Silva
- 优先权: EP0304623.2 20030228
- 国际申请: PCT/GB04/00849 WO 20040301
- 主分类号: H01L51/40
- IPC分类号: H01L51/40 ; H01L29/06
摘要:
An apparatus comprises a scanning electron microscope (SEM) (1) positioned over a manipulation chamber (2) which houses a sample holder (3). The walls of the manipulation chamber (2) support two probes (4, 4a) and the sample holder (3) is able to hold a sample (5), such as carbon nanotubes (10a) carried on a substrate (10). The apparatus can selectively move and apply voltages and currents to the probe or probes (4, 4a) and sample holder (3) under the SEM (1). By controlling the current that is passed across a contact between the probe (4) and a carbon nanotube (10a), a conditioned weld is formed. Likewise, by controlling the current that is passed along a carbon nanotube (10a), the nanotube (10a) can be annealed. Using both the probes (4, 4a) a carbon nanotube can be held and cut at any position along its length. This allows the formation of novel carbon nanotube structures.
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