发明申请
- 专利标题: Multi-menisci processing apparatus
- 专利标题(中): 多功能加工设备
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申请号: US11437891申请日: 2006-05-18
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公开(公告)号: US20060207636A1公开(公告)日: 2006-09-21
- 发明人: James Garcia , Mike Ravkin , Carl Woods , Fred Redeker , John de Larios
- 申请人: James Garcia , Mike Ravkin , Carl Woods , Fred Redeker , John de Larios
- 申请人地址: US CA Fremont 94538
- 专利权人: Lam Research Corp.
- 当前专利权人: Lam Research Corp.
- 当前专利权人地址: US CA Fremont 94538
- 主分类号: B08B3/00
- IPC分类号: B08B3/00 ; B08B3/12
摘要:
A substrate preparation apparatus is provided. The apparatus includes a housing configured to be installed in a substrate fabrication facility. The housing includes a manifold for use in preparing a wafer surface. The manifold is configured to include a first process window in a first portion of the manifold. A first fluid meniscus is capable of being defined within the first process window. Further included is a second process window in a second portion of the manifold. A second fluid meniscus is capable of being defined within the second process window. An arm is integrated with the housing, and the arm is coupled to the manifold, such that the arm is capable of positioning the manifold in proximity with the substrate during operation. The apparatus therefore provides for the formation of multi-menisci over the surface of a substrate using a single manifold.
公开/授权文献
- US07464719B2 Multi-menisci processing apparatus 公开/授权日:2008-12-16
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