发明申请
- 专利标题: Method of measuring decentering of lens
- 专利标题(中): 测量透镜偏心的方法
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申请号: US11378699申请日: 2006-03-17
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公开(公告)号: US20060209294A1公开(公告)日: 2006-09-21
- 发明人: Yasunori Murata
- 申请人: Yasunori Murata
- 优先权: JP2005-079725 20050318
- 主分类号: G01B9/00
- IPC分类号: G01B9/00
摘要:
Disclosed is a measuring method which can measure the decentering of an axis by the measurement of a two-dimensional curved surface profile. This method has a first step of measuring a profile of a examined surface by a probe from a first reference position which is a position separate by a predetermined amount from a predetermined position on the examined surface of a subject lens, a second step of measuring the profile of the examined surface by scanning the examined surface by the probe from the second reference position which is a position separate by a predetermined amount from said predetermined position in a route opposite to the scanning direction of said first step after a rotation of the subject lens; and the step of obtaining the decentering amount of the examined surface by the use of the measurement results obtained at the first and second steps.
公开/授权文献
- US07440089B2 Method of measuring decentering of lens 公开/授权日:2008-10-21
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