- 专利标题: Antireflective coating for semiconductor devices and method for the same
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申请号: US11080727申请日: 2005-03-15
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公开(公告)号: US20060209386A1公开(公告)日: 2006-09-21
- 发明人: Paul Sudak , Robert Adams , Jason Neidrich , Simon Jacobs , Lisa Wesneski , Linda Wills , William Carter , Judith Frederic
- 申请人: Paul Sudak , Robert Adams , Jason Neidrich , Simon Jacobs , Lisa Wesneski , Linda Wills , William Carter , Judith Frederic
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
According to one embodiment of the present invention, a semiconductor device includes a first layer of dielectric material disposed upon an upper surface of a substrate of a semiconductor device and a first non-conductive layer of metal disposed upon an upper surface of the dielectric material. The first layer of dielectric material and the first non-conductive layer of metal act as an optical trap for electromagnetic radiation received by the first non-conductive layer of metal. In particular embodiments, the semiconductor device may further comprise a second layer of dielectric material disposed upon an upper surface of the first non-conductive layer of metal and a second non-conductive layer of metal disposed upon an upper surface of the second layer of dielectric material.
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