发明申请
US20060211176A1 Manufacturing method for physical quantity sensor using lead frame and bonding device therefor 审中-公开
使用引线框架及其接合装置的物理量传感器的制造方法

  • 专利标题: Manufacturing method for physical quantity sensor using lead frame and bonding device therefor
  • 专利标题(中): 使用引线框架及其接合装置的物理量传感器的制造方法
  • 申请号: US11368848
    申请日: 2006-03-07
  • 公开(公告)号: US20060211176A1
    公开(公告)日: 2006-09-21
  • 发明人: Kenichi ShirasakaHiroshi Saitoh
  • 申请人: Kenichi ShirasakaHiroshi Saitoh
  • 申请人地址: JP Tokyo
  • 专利权人: Shiga International
  • 当前专利权人: Shiga International
  • 当前专利权人地址: JP Tokyo
  • 优先权: JPP2005-066183 20050309; JPP2005-091614 20050328; JPP2005-176221 20050616; JPP2005-197439 20050706
  • 主分类号: H01L21/00
  • IPC分类号: H01L21/00 H01L23/48 H01L23/52 H01L29/40
Manufacturing method for physical quantity sensor using lead frame and bonding device therefor
摘要:
A physical quantity sensor is produced using a lead frame having at least one stage for mounting a physical quantity sensor chip and a frame having leads, wherein the physical quantity sensor chip is inclined with respect to the frame. A bonding device performs wire bonding so as to electrically connect the physical quantity sensor chip and leads, which are respectively located perpendicular to a capillary for discharging wires. The bonding device includes a wedge tool having a first planar surface for holding one ends of wires with leads and a second planar surface for holding the other ends of wires with the physical quantity sensor chip. The lead frame includes interconnection leads, having shape memory alloys, for interconnecting the stage and frame together. The physical quantity sensor chip can be mounted on the stage via an inclination member having a wedge shape.
信息查询
0/0