发明申请
- 专利标题: Pressure sensor device and pressure sensor cell thereof
- 专利标题(中): 压力传感器装置及其压力传感器单元
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申请号: US11372465申请日: 2006-03-10
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公开(公告)号: US20060213276A1公开(公告)日: 2006-09-28
- 发明人: Katsumichi Ueyanagi , Shigeru Shinoda , Kimihiro Ashino , Kazunori Saito
- 申请人: Katsumichi Ueyanagi , Shigeru Shinoda , Kimihiro Ashino , Kazunori Saito
- 申请人地址: JP Shinagawa-ku
- 专利权人: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.
- 当前专利权人: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.
- 当前专利权人地址: JP Shinagawa-ku
- 优先权: JP2005-084295 20050323
- 主分类号: G01L9/00
- IPC分类号: G01L9/00
摘要:
A pressure sensor device includes a pressure sensor cell that includes a sensor chip having a diaphragm with piezo-resistors, an amplifying circuit, and various adjusting circuits, and a base member to which the sensor chip is joined, with the diaphragm facing a through hole of the base member. The base member and a metallic member are joined together with a joining member so that their respective through holes communicate with each other. A protective film or filler covers the joining member between the base member and the metallic pipe member. The metallic pipe member is bonded to a resin case, and a signal terminal of the resin case and the pressure sensor chip are electrically connected together by wire bonding, thus forming a pressure sensor cell. The metallic pipe member protrudes beyond an end face of the resin case to support load.
公开/授权文献
- US07370536B2 Pressure sensor device and pressure sensor cell thereof 公开/授权日:2008-05-13
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