发明申请
- 专利标题: Substrate cleaning apparatus and substrate cleaning method
- 专利标题(中): 基板清洗装置和基板清洗方法
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申请号: US11396435申请日: 2006-03-24
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公开(公告)号: US20060213536A1公开(公告)日: 2006-09-28
- 发明人: Masanobu Sato
- 申请人: Masanobu Sato
- 专利权人: DAINIPPON SCREEN MFG. CO., LTD.
- 当前专利权人: DAINIPPON SCREEN MFG. CO., LTD.
- 优先权: JP2005-90761 20050328
- 主分类号: B08B7/04
- IPC分类号: B08B7/04 ; A47L25/00
摘要:
In a substrate cleaning apparatus, first cleaning solution is applied onto a substrate from a cleaning nozzle and the substrate is scrubbed with a brush, whereby the substrate is cleaned. While cleaning of the substrate is not performed, second cleaning solution is applied to the brush from a cleaning solution nozzle provided in a container to clean the brush. Since the second cleaning solution used in the substrate cleaning apparatus is almost neutral at hydrogen ion exponent pH of 6.5, and a zeta potential of the brush in the second cleaning solution has the same polarity as a zeta potential of particles which have adhered to the brush while cleaning the substrate, it is possible to efficiently remove particles adhering to the brush during cleaning of the substrate with suppressing deterioration of the brush.
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