发明申请
- 专利标题: Servo pattern characterization on magnetic disks
- 专利标题(中): 磁盘上的伺服模式表征
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申请号: US11432609申请日: 2006-05-11
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公开(公告)号: US20060215289A1公开(公告)日: 2006-09-28
- 发明人: Zhen Hou , Ronny Soetarman , Vamsi Velidandla , Steven Meeks
- 申请人: Zhen Hou , Ronny Soetarman , Vamsi Velidandla , Steven Meeks
- 专利权人: KLA-Tencor Technologies Corp.
- 当前专利权人: KLA-Tencor Technologies Corp.
- 主分类号: G11B5/02
- IPC分类号: G11B5/02 ; G11B5/596
摘要:
In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target radiation onto a surface, a reflected radiation collecting assembly that collects radiation reflected from the surface, and a signal processing module. The signal processing module generates an image of magnetic characteristics of the magnetic disk, wherein the image comprises a plurality of servo sector arcs, locates a sample of points on a plurality of the servo sector arcs, fits a circle to the sample of points on each of the plurality of servo sector arcs, and determines at least one pivot-to-gap measurement from the radius of the circles.
公开/授权文献
- US07397621B2 Servo pattern characterization on magnetic disks 公开/授权日:2008-07-08