Invention Application
US20060219006A1 Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
有权
制造具有垂直集成电子元件和晶片级密封包装的X-Y轴双质量音叉陀螺仪的方法
- Patent Title: Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
- Patent Title (中): 制造具有垂直集成电子元件和晶片级密封包装的X-Y轴双质量音叉陀螺仪的方法
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Application No.: US11283083Application Date: 2005-11-18
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Publication No.: US20060219006A1Publication Date: 2006-10-05
- Inventor: Steven Nasiri , Joseph Seeger , Martin Lim , Anthony Flannery , Alexander Castro
- Applicant: Steven Nasiri , Joseph Seeger , Martin Lim , Anthony Flannery , Alexander Castro
- Main IPC: G01P9/04
- IPC: G01P9/04
Abstract:
A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane is provided. The dual-axis sensor includes a first subsensor for measuring the X component of angular velocity, and a second subsensor for measuring the Y component of angular velocity. The first subsensor and the second subsensor are contained within a single hermetic seal within the dual-axis sensor.
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