发明申请
- 专利标题: Articulated MEMs structures
- 专利标题(中): 铰接式MEMs结构
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申请号: US11354052申请日: 2006-02-15
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公开(公告)号: US20060222312A1公开(公告)日: 2006-10-05
- 发明人: Mohiuddin Mala , Barrie Keyworth , John Miller , Thomas Ducellier , Graham McKinnon
- 申请人: Mohiuddin Mala , Barrie Keyworth , John Miller , Thomas Ducellier , Graham McKinnon
- 主分类号: G02B6/00
- IPC分类号: G02B6/00
摘要:
The present invention relates to an articulated micro-electro-mechanical (MEMS) device, which is constructed in such a way as to enable several of the devices to be closely packed together, i.e. high fill factor, for redirecting specific wavelengths of light from a dispersed optical signal to different output ports. The articulated MEMS device includes multiple pivotally connected sections that are pivotable about two perpendicular axes for limiting the amount of dynamic cross-talk as the device is rotated between different positions.
公开/授权文献
- US07432629B2 Articulated MEMs structures 公开/授权日:2008-10-07
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