发明申请
US20060223230A1 SEMICONDUCTOR PACKAGE SUBSTRATE HAVING CONTACT PAD PROTECTIVE LAYER FORMED THEREON AND METHOD FOR FABRICATING THE SAME 审中-公开
具有接触垫保护层的半导体封装基板及其制造方法

  • 专利标题: SEMICONDUCTOR PACKAGE SUBSTRATE HAVING CONTACT PAD PROTECTIVE LAYER FORMED THEREON AND METHOD FOR FABRICATING THE SAME
  • 专利标题(中): 具有接触垫保护层的半导体封装基板及其制造方法
  • 申请号: US11424797
    申请日: 2006-06-16
  • 公开(公告)号: US20060223230A1
    公开(公告)日: 2006-10-05
  • 发明人: Shih-Ping HsuKun-Chen Tsai
  • 申请人: Shih-Ping HsuKun-Chen Tsai
  • 优先权: TW092122202 20030813
  • 主分类号: H01L21/00
  • IPC分类号: H01L21/00
SEMICONDUCTOR PACKAGE SUBSTRATE HAVING CONTACT PAD PROTECTIVE LAYER FORMED THEREON AND METHOD FOR FABRICATING THE SAME
摘要:
A semiconductor package substrate and a method for fabricating the same are proposed. An insulating layer has a plurality of blind vias to expose inner traces underneath the insulating layer. A conductive film is formed on the insulating layer and over the bind vias. A first resist is formed on the conductive film, having openings to expose parts of the conductive film. A patterned trace layer including a plurality of contact pads is formed in the openings and the blind vias to form conductive vias, with at least one contact pad electrically connected to one conductive via. A second resist is formed on the patterned trace layer without covering the contact pads. A metal barrier layer is formed on the contact pads. Finally, the first and second resists and parts of the conductive film covered the first resist are removed.
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