发明申请
US20060223314A1 Method of treating a composite spin-on glass/anti-reflective material prior to cleaning
失效
在清洁之前处理复合旋涂玻璃/抗反射材料的方法
- 专利标题： Method of treating a composite spin-on glass/anti-reflective material prior to cleaning
- 专利标题（中）： 在清洁之前处理复合旋涂玻璃/抗反射材料的方法
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申请号： US11094939申请日： 2005-03-30
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公开(公告)号： US20060223314A1公开(公告)日： 2006-10-05
- 发明人: Paul Schilling
- 申请人： Paul Schilling
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; H01L21/461
摘要：
Methods are provided for cleaning a microelectronic device, and one method includes providing a substrate having a patterned SOG/anti-reflective material; performing a process to cure the patterned SOG/anti-reflective material; and performing a cleaning process to remove the cured SOG/anti-reflective material. An apparatus for cleaning a microelectronic device is provided that includes a processing chamber; means for performing a SOG/anti-reflective material curing process within the processing chamber, means for performing a cleaning process within the processing chamber and means for venting the processing chamber.