发明申请
- 专利标题: Method and system for refurbishing a metal carbonyl precursor
- 专利标题(中): 用于翻新金属羰基前体的方法和系统
-
申请号: US11095448申请日: 2005-03-31
-
公开(公告)号: US20060224008A1公开(公告)日: 2006-10-05
- 发明人: Kenji Suzuki , Gerrit Leusink , Fenton McFeely
- 申请人: Kenji Suzuki , Gerrit Leusink , Fenton McFeely
- 专利权人: Tokyo Electron Limited,International Business Machines Corporation
- 当前专利权人: Tokyo Electron Limited,International Business Machines Corporation
- 主分类号: C07F15/00
- IPC分类号: C07F15/00
摘要:
A method and system for refurbishing a metal carbonyl precursor. The method includes providing a metal precursor vaporization system containing a metal carbonyl precursor containing un-reacted and partially reacted metal carbonyl precursor, flowing a CO-containing gas through the metal precursor vaporization system to a precursor collection system in fluid communication with the metal precursor vaporization system to transfer the un-reacted metal carbonyl precursor vapor to the precursor collection system, and collecting the transferred metal carbonyl precursor in the precursor collection system. A method is provided for monitoring at least one metal carbonyl precursor parameter to determine a status of the metal carbonyl precursor and the need for refurbishing the metal carbonyl precursor.