发明申请
- 专利标题： Phase change based heating element system and method
- 专利标题（中）： 基于相变的加热元件系统及方法
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申请号： US11093536申请日： 2005-03-29
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公开(公告)号： US20060226117A1公开(公告)日： 2006-10-12
- 发明人: Ronald Bertram , Joseph Hillman , Maximilan Biberger
- 申请人： Ronald Bertram , Joseph Hillman , Maximilan Biberger
- 主分类号： C03C25/68
- IPC分类号： C03C25/68 ; G01L21/30 ; H01L21/306
摘要：
A method of and apparatus for regulating carbon dioxide using a pre-injection assembly coupled to a processing chamber operating at a supercritical state is disclosed. The method and apparatus utilize a source for providing supercritical carbon dioxide to the pre-injection assembly and a temperature control element for maintaining the pre-injection region at a supercritical temperature and pressure.