发明申请
- 专利标题: High temperature pressure transducer having a shaped ceramic face
- 专利标题(中): 具有成形陶瓷面的高温压力传感器
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申请号: US11100682申请日: 2005-04-07
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公开(公告)号: US20060226738A1公开(公告)日: 2006-10-12
- 发明人: Anthony Kurtz , Adam Kane , Andrew Schwartz
- 申请人: Anthony Kurtz , Adam Kane , Andrew Schwartz
- 主分类号: H01L41/113
- IPC分类号: H01L41/113
摘要:
A high temperature pressure transducer includes a extended tubular member having a opening from a front to a back surface. The tubular member is preferably fabricated from a metal. At the front end of the tubular member is a ceramic sensor face or tip which basically is a ceramic disk having a curved front surface and having a extending stem which inserted into the front opening of the tubular member. The column is of a given length and terminates in a back end. The back end has a predetermined portion which consists of two flat surfaces each on opposite sides. The back end containing the flat surfaces is thinner than the thickness of the column. On these flat surfaces are positioned suitable semiconductor piezoresistors. When a force is applied to the ceramic sensor face, it is transmitted axially through the tube or column where it is received by the sensors positioned on the flats. The sensors produce an output indicative of the force applied. The sensors may be arranged in a suitable bridge configuration.
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