发明申请
- 专利标题: Light wavefront measuring instrument, light wavefront measuring method, and light source adjusting method
- 专利标题(中): 光波前测量仪,光波前测量方法和光源调节方法
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申请号: US10548838申请日: 2003-11-17
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公开(公告)号: US20060227335A1公开(公告)日: 2006-10-12
- 发明人: Nobuo Takeshita , Teruo Fujita , Toshiya Matozaki , Michihiro Tadokoro
- 申请人: Nobuo Takeshita , Teruo Fujita , Toshiya Matozaki , Michihiro Tadokoro
- 优先权: JP2003-115359 20030521
- 国际申请: PCT/JP03/14593 WO 20031117
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
A light wavefront measuring apparatus (2, 2a, 42) includes a separating element (7a, 47a) for separating a flux of light which exits from an optical head (1, 31) into a first beam and a second beam, a first interference fringe display section (21, 21a) for displaying interference fringes formed from the first beam, a Dove prism (13, 53) for rotating a wavefront of the second beam around its optical axis (AX2), and a second interference fringe display section (22, 22a) for displaying interference fringes formed from the second beam which passed through it. In adjustment of the light source device, position of a collimator (5) in the optical head (1, 31) is adjusted in optical axis direction so as to approximate the interference fringe patterns displayed in the interference fringe display sections (21, 22, 21a, 22a) each other.
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