发明申请
US20060227335A1 Light wavefront measuring instrument, light wavefront measuring method, and light source adjusting method 失效
光波前测量仪,光波前测量方法和光源调节方法

Light wavefront measuring instrument, light wavefront measuring method, and light source adjusting method
摘要:
A light wavefront measuring apparatus (2, 2a, 42) includes a separating element (7a, 47a) for separating a flux of light which exits from an optical head (1, 31) into a first beam and a second beam, a first interference fringe display section (21, 21a) for displaying interference fringes formed from the first beam, a Dove prism (13, 53) for rotating a wavefront of the second beam around its optical axis (AX2), and a second interference fringe display section (22, 22a) for displaying interference fringes formed from the second beam which passed through it. In adjustment of the light source device, position of a collimator (5) in the optical head (1, 31) is adjusted in optical axis direction so as to approximate the interference fringe patterns displayed in the interference fringe display sections (21, 22, 21a, 22a) each other.
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