发明申请
- 专利标题: Unidirectionally conductive materials for interconnection
- 专利标题(中): 用于互连的单向导电材料
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申请号: US11321127申请日: 2005-12-28
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公开(公告)号: US20060228884A1公开(公告)日: 2006-10-12
- 发明人: Reza Golzarian , Robert Meagley , Seiichi Morimoto , Mansour Moinpour
- 申请人: Reza Golzarian , Robert Meagley , Seiichi Morimoto , Mansour Moinpour
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763 ; H01L21/44
摘要:
A method of forming and a device including an interconnect structure having a unidirectional electrical conductive material is described. The unidirectional conductive material may overlie interconnect materials, and/or may surround interconnect materials, such as by lining the walls and base of a trench and via. The unidirectional conductive material may be configured to conduct electricity in a direction corresponding to a projection to or from a contact point and conductive material overlying the unidirectional conductive material, but have no substantial electrical conductivity in other directions. Moreover, the unidirectional conductive material may be electrically conductive in a direction normal to a surface over which it is formed or in directions along or across a plane, but have no substantial electrical conductivity in other directions. Finally, the unidirectional conductive material may have properties tending to reduce metal diffusion, reduce electron migration, provide adhesion or bonding, and/or act as an etch stop.
公开/授权文献
- US07405419B2 Unidirectionally conductive materials for interconnection 公开/授权日:2008-07-29
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