发明申请
- 专利标题: INTEGRATED CIRCUIT SYSTEM FOR BONDING
- 专利标题(中): 用于绑定的集成电路系统
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申请号: US10907732申请日: 2005-04-13
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公开(公告)号: US20060231948A1公开(公告)日: 2006-10-19
- 发明人: Yaojian Lin , Byung Tai Do , Wan Lay Looi , Haijing Cao
- 申请人: Yaojian Lin , Byung Tai Do , Wan Lay Looi , Haijing Cao
- 申请人地址: SG Singapore
- 专利权人: STATS CHIPPAC LTD.
- 当前专利权人: STATS CHIPPAC LTD.
- 当前专利权人地址: SG Singapore
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L23/52 ; H01L29/40
摘要:
An integrated circuit system provides a precursor for an integrated wire bond and flip chip structure. The precursor has a plurality of contact pads thereon. A layer of titanium is deposited on the precursor. A layer of nickel-vanadium is deposited on the layer of titanium. A layer of copper is deposited on the layer of nickel-vanadium. A mask is formed on at least a portion of the layer of copper. Portions of the layers of copper and nickel-vanadium not protected by the mask are removed to expose portions of the layer of titanium. The exposed portions of the layer of titanium are etched with an etching solution consisting of an etchant, a viscosity modifier, and an oxidizer.
公开/授权文献
- US07381634B2 Integrated circuit system for bonding 公开/授权日:2008-06-03
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