发明申请
- 专利标题: Method for producing structure
- 专利标题(中): 生产结构的方法
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申请号: US11405401申请日: 2006-04-18
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公开(公告)号: US20060234396A1公开(公告)日: 2006-10-19
- 发明人: Tadabumi Tomita , Yoshinori Hotta , Akio Uesugi
- 申请人: Tadabumi Tomita , Yoshinori Hotta , Akio Uesugi
- 专利权人: FUJI PHOTO FILM CO., LTD.
- 当前专利权人: FUJI PHOTO FILM CO., LTD.
- 优先权: JP2005-119418 20050418; JP2005-221625 20050729
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/76
摘要:
Disclosed is a method for producing a structure having: a stripping step in which an aluminum member including an aluminum substrate and an anodized layer present on the aluminum substrate, which layer contains micropores having an average pore diameter of 10 to 500 nm and a coefficient of variation in pore diameter of less than 30%, is electrolyzed in an aqueous acid solution by using the aluminum member for a cathode to thereby strip the anodized layer off the aluminum substrate so as to produce a structure composed of the anodized layer with a plurality of recesses. The method can produce a structure having regularly arranged recesses in a reduced time.
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