发明申请
US20060234398A1 SINGLE IC-CHIP DESIGN ON WAFER WITH AN EMBEDDED SENSOR UTILIZING RF CAPABILITIES TO ENABLE REAL-TIME DATA TRANSMISSION
审中-公开
采用嵌入式传感器的单片IC芯片设计，利用RF功能实现实时数据传输
- 专利标题： SINGLE IC-CHIP DESIGN ON WAFER WITH AN EMBEDDED SENSOR UTILIZING RF CAPABILITIES TO ENABLE REAL-TIME DATA TRANSMISSION
- 专利标题（中）： 采用嵌入式传感器的单片IC芯片设计，利用RF功能实现实时数据传输
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申请号： US10907798申请日： 2005-04-15
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公开(公告)号： US20060234398A1公开(公告)日： 2006-10-19
- 发明人: Oleg Gluschenkov , Timothy Little , Gary Snyder
- 申请人： Oleg Gluschenkov , Timothy Little , Gary Snyder
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L21/66 ; H01L21/306 ; B05C11/00
摘要：
An apparatus and method for real-time monitoring process conditions of a semiconductor wafer processing operation. A semiconductor wafer subject to processing in a wafer processing tool is embedded with one or more sensor devices. In response to receipt of wireless electromagnetic signals, the embedded sensor devices are activated for generating sensory data. The electromagnetic signals are further utilized to activate a transmitter device provided in the wafer to wirelessly transmit the sensory data generated from the activated embedded sensor device. The transmitted electromagnetic signals comprising the sensory data are communicated to a control device for controlling processing conditions of the process tool based upon the received sensory data.
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