- 专利标题: CPP read sensor fabrication using heat resistant photomask
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申请号: US11110330申请日: 2005-04-19
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公开(公告)号: US20060234483A1公开(公告)日: 2006-10-19
- 发明人: Satoru Araki , Robert Beach , Ying Hong , Thomas Leong , Timothy Minvielle , Howard Zolla
- 申请人: Satoru Araki , Robert Beach , Ying Hong , Thomas Leong , Timothy Minvielle , Howard Zolla
- 专利权人: Hitachi Global Storage Technologies Netherlands B.V.
- 当前专利权人: Hitachi Global Storage Technologies Netherlands B.V.
- 主分类号: H01L21/22
- IPC分类号: H01L21/22
摘要:
A method is disclosed for fabricating a CPP read head for a magnetic disk drive having an electrical isolation layer. The method includes providing a first shield layer, depositing a sensor stack on the first shield layer, a CMP stop layer is deposited on the sensor stack, and a release layer is deposited a on the CMP stop layer. Photoresist material containing Si is deposited on the release layer, and the photoresist material is then patterned and then oxidized by Reactive Ion Etching to form a high temperature photomask. The electrical isolation layer is then deposited to surround the sensor stack using a high temperature deposition process. The read head is then continued as either an in-stack bias sensor with ‘draped shield’ variation, or a hard bias stabilization variation.
公开/授权文献
- US07530158B2 CPP read sensor fabrication using heat resistant photomask 公开/授权日:2009-05-12