发明申请
- 专利标题： Liquid drop discharge head and manufacture method thereof, micro device, ink-jet head, ink cartridge, and ink-jet printing device
- 专利标题（中）： 液滴排放头及其制造方法，微型装置，喷墨头，墨盒和喷墨打印装置
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申请号： US11471138申请日： 2006-06-19
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公开(公告)号： US20060238579A1公开(公告)日： 2006-10-26
- 发明人: Kenichiroh Hashimoto , Tadashi Mimura
- 申请人： Kenichiroh Hashimoto , Tadashi Mimura
- 优先权： JP2001-270165 20010906; JP2002-213478 20020723
- 主分类号： B41J2/045
- IPC分类号： B41J2/045
摘要：
A liquid drop discharge head includes a chip 21 that is formed by separation of a silicon wafer 20. The silicon wafer 20 has a first direction and a second direction which are mutually intersected. The chip 21 is separated from the silicon wafer 20 by etching the wafer along a separation line 22 parallel to the first direction of the wafer and by dicing the wafer 20 along a separation line 23 parallel to the second direction of the wafer.
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