发明申请
US20060239413A1 Soft x-ray shielding structure, soft x-ray irradiation static eliminating apparatus, and ionized-air emitting method
审中-公开
软X射线屏蔽结构,软X射线照射静电消除装置和电离空气发射方法
- 专利标题: Soft x-ray shielding structure, soft x-ray irradiation static eliminating apparatus, and ionized-air emitting method
- 专利标题(中): 软X射线屏蔽结构,软X射线照射静电消除装置和电离空气发射方法
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申请号: US11369924申请日: 2006-03-07
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公开(公告)号: US20060239413A1公开(公告)日: 2006-10-26
- 发明人: Kengo Honma , Hitoshi Nakao , Motoki Itoda , Osamu Gomi , Kazuhiro Suzuki
- 申请人: Kengo Honma , Hitoshi Nakao , Motoki Itoda , Osamu Gomi , Kazuhiro Suzuki
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 优先权: JP2005-090087 20050325
- 主分类号: H01J35/16
- IPC分类号: H01J35/16
摘要:
There is provided a soft X-ray shielding structure of a soft X-ray irradiation static eliminating apparatus which irradiates air to be supplied with soft X-rays and ionizes the same, the soft X-ray shielding structure allowing the passing of the ionized air and shielding the soft X-rays and including: an accommodation body having a mesh-like inflow opening and a mesh-like outflow opening and made of a soft X-ray shielding material; and a plurality of massive members filled in the accommodation body and made of a substance shielding electromagnetic waves.
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