发明申请
- 专利标题: TRANSFER METHOD AND TRANSFER APPARATUS
- 专利标题(中): 传送方法和传送装置
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申请号: US11380280申请日: 2006-04-26
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公开(公告)号: US20060243377A1公开(公告)日: 2006-11-02
- 发明人: Keisuke Matsuo , Eisuke Matsuda
- 申请人: Keisuke Matsuo , Eisuke Matsuda
- 优先权: JPP2005-128908 20050427; JPP2005-168018 20050608
- 主分类号: B44C1/17
- IPC分类号: B44C1/17
摘要:
A transfer method includes the steps of placing a donor substrate including a support base and a transfer layer provided on the support base onto a receptor substrate such that the transfer layer faces the receptor substrate, evacuating a space between the receptor substrate and the donor substrate that are placed one on the other, and transferring the transfer layer onto the receptor substrate by applying a radiant ray onto the donor substrate in an evacuated atmosphere.
公开/授权文献
- US07648944B2 Transfer method and transfer apparatus 公开/授权日:2010-01-19
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