发明申请
US20060243620A1 Fixing carrier, fixing carrier manufacturing method, method of using fixing carriers and substrate storage container 审中-公开
固定载体,固定载体制造方法,使用固定载体和基材储存容器的方法

  • 专利标题: Fixing carrier, fixing carrier manufacturing method, method of using fixing carriers and substrate storage container
  • 专利标题(中): 固定载体,固定载体制造方法,使用固定载体和基材储存容器的方法
  • 申请号: US11342704
    申请日: 2006-01-31
  • 公开(公告)号: US20060243620A1
    公开(公告)日: 2006-11-02
  • 发明人: Satoshi OdashimaNoriyoshi Hosono
  • 申请人: Satoshi OdashimaNoriyoshi Hosono
  • 申请人地址: JP Chuo-ku
  • 专利权人: SHIN-ETSU POLYMER CO., LTD.
  • 当前专利权人: SHIN-ETSU POLYMER CO., LTD.
  • 当前专利权人地址: JP Chuo-ku
  • 优先权: JP2005-27910 20050203; JP2005-132385 20050428; JP2005-137537 20050510
  • 主分类号: B65D85/00
  • IPC分类号: B65D85/00
Fixing carrier, fixing carrier manufacturing method, method of using fixing carriers and substrate storage container
摘要:
An object is to provide a fixing carrier, a fixing carrier manufacturing method, a method of using the fixing carrier and a substrate storage container, which provide proper shipment of items to be loaded that are prone to warp and crack. A base 2 having rigidity is hollowed on its surface and formed with a sectioned space 3 laminated and covered by a supporting layer 8 that supports semiconductor wafer W, multiple projections 4 that are formed in the sectioned space and supports supporting layer 8 in contact therewith and an exhaust passage 6 that is bored through base 2 and draws air out of sectioned space 3 covered by supporting layer 8. Since semiconductor wafer W that is prone to warp and crack is supported by supporting layer 8 of a fixing carrier 1 and accommodated in the container body of a substrate storage container, instead of being kept directly in the container, so it is possible to achieve safe and proper shipment between factories.
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