- 专利标题： Apparatus for inspecting a disk-like object
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申请号： US11391066申请日： 2006-03-28
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公开(公告)号： US20060245965A1公开(公告)日： 2006-11-02
- 发明人: Joachim Wienecke , Thomas Krieg
- 申请人： Joachim Wienecke , Thomas Krieg
- 申请人地址： DE Wetzlar
- 专利权人： Vistec Semiconductor Systems GmbH
- 当前专利权人： Vistec Semiconductor Systems GmbH
- 当前专利权人地址： DE Wetzlar
- 优先权： DE102005014593.0 20050331
- 主分类号： F04B39/00
- IPC分类号： F04B39/00
摘要：
An apparatus for inspecting a disk-like object comprising at least one first module for inspecting a surface of the disk-like object and at least one second module insertable in the apparatus. The at least one second module is arranged to inspect a different element of the disk-like object than the surface of the disk-like object.
公开/授权文献
- US07489394B2 Apparatus for inspecting a disk-like object 公开/授权日：2009-02-10
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