- 专利标题: Tuning fork type crystal component for angular velocity sensor and manufacturing method thereof
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申请号: US11481290申请日: 2006-07-05
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公开(公告)号: US20060250051A1公开(公告)日: 2006-11-09
- 发明人: Hideryo Matsudo , Shigeto Yotuya , Jun Katase , Takahiro Ohtsuka
- 申请人: Hideryo Matsudo , Shigeto Yotuya , Jun Katase , Takahiro Ohtsuka
- 专利权人: Nihon Dempa Kogyo Co., Ltd.
- 当前专利权人: Nihon Dempa Kogyo Co., Ltd.
- 优先权: JPJP2003-351910 20031010; JPJP2004-087735 20040324
- 主分类号: H03H9/21
- IPC分类号: H03H9/21
摘要:
The present invention provides an angular velocity sensor element that can be produced easily with a high degree of accuracy, and a manufacturing method thereof. In the angular velocity sensor element of the present invention, the lengthwise direction of a tuning fork shaped crystal element is a Y axis of a crystal axis, the widthwise direction is an X axis and the depthwise direction is a Z axis, and mutually electrically separated first and second sensor electrodes for angular velocity detection are provided on at least one face among side faces of the tuning fork arm. The tuning fork shaped crystal element is formed from a single crystal wafer by a photo-etching technique, and the side face of the tuning fork arm on which the first and second sensor electrodes are formed is a +X face of the crystal, and the first and second sensor electrodes are arranged on both sides of a protrusion ridge line section on the +X face that occurs in the lengthwise direction of the side face due to crystallinity of the crystal.
公开/授权文献
- US07716807B2 Process of making a tuning fork type crystal component 公开/授权日:2010-05-18