- 专利标题: Methods of forming pluralities of capacitors, and integrated circuitry
-
申请号: US11480089申请日: 2006-06-30
-
公开(公告)号: US20060252224A1公开(公告)日: 2006-11-09
- 发明人: Cem Basceri , Gurtej Sandhu
- 申请人: Cem Basceri , Gurtej Sandhu
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
A method of forming a plurality of capacitors includes providing a plurality of capacitor electrodes comprising sidewalls. The plurality of capacitor electrodes are supported at least in part with a retaining structure which engages the sidewalls, with the retaining structure comprising a fluid pervious material. A capacitor dielectric material is deposited over the capacitor electrodes through the fluid pervious material of the retaining structure effective to deposit capacitor dielectric material over portions of the sidewalls received below the retaining structure. Capacitor electrode material is deposited over the capacitor dielectric material through the fluid pervious material of the retaining structure effective to deposit capacitor electrode material over at least some of the capacitor dielectric material received below the retaining structure. Integrated circuitry independent of method of fabrication is also contemplated.
公开/授权文献
信息查询
IPC分类: