发明申请
- 专利标题： System for repositioning a microfabricated cantilever
- 专利标题（中）： 用于重新定位微加工悬臂的系统
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申请号： US11128661申请日： 2005-05-13
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公开(公告)号： US20060255266A1公开(公告)日： 2006-11-16
- 发明人: Alison Chaiken , Henryk Birecki
- 申请人： Alison Chaiken , Henryk Birecki
- 主分类号： G21K7/00
- IPC分类号： G21K7/00
摘要：
A system for repositioning a microfabricated cantilever includes a microfabricated cantilever, a first device operable to detect a position of the microfabricated cantilever, and a second device. The first device is operable to determine an offset in the position of the microfabricated cantilever, and the second device is operable to reposition the microfabricated cantilever based on an offset detected by the first device.
公开/授权文献
- US07372026B2 System for repositioning a microfabricated cantilever 公开/授权日：2008-05-13
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