发明申请
- 专利标题： Method for the calibration of radio frequency generator output power
- 专利标题（中）： 射频发生器输出功率校准方法
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申请号： US11128239申请日： 2005-05-13
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公开(公告)号： US20060258022A1公开(公告)日： 2006-11-16
- 发明人: Timothy Wright
- 申请人： Timothy Wright
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L21/66 ; C23F1/00
摘要：
A method, system and computer-readable medium for calibrating the radio frequency power generator in a semiconductor processing system. The output of the radio frequency power generator is routed to a dummy load. An input control of the radio frequency power generator is adjusted to produce a desired output power conversion factors and calculated and used to control the radio frequency power generator.
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