发明申请
- 专利标题: NAND memory arrays
- 专利标题(中): NAND存储器阵列
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申请号: US11486596申请日: 2006-07-14
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公开(公告)号: US20060258093A1公开(公告)日: 2006-11-16
- 发明人: Michael Violette , Garo Derderian , Todd Abbott
- 申请人: Michael Violette , Garo Derderian , Todd Abbott
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A NAND memory array has a first dielectric layer formed on a first portion of a semiconductor substrate and a second dielectric layer formed on a second portion of the semiconductor substrate and adjoining the first dielectric layer. The first dielectric layer is thicker than the second dielectric layer. A first gate stack is formed on the first dielectric layer to form a drain select gate. A string of second gate stacks is formed on the second dielectric layer to form a NAND string of floating-gate memory cells. A first end of the NAND string is coupled in series with the drain select gate. A third gate stack is formed on the second dielectric layer to form a source select gate. A second end of the NAND string is coupled in series with the source select gate.
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