发明申请
- 专利标题: Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor
- 专利标题(中): 制备电子显微镜检查样品的方法,以及用于其的样品支架和运输支架
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申请号: US11377495申请日: 2006-03-16
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公开(公告)号: US20060261270A1公开(公告)日: 2006-11-23
- 发明人: Claus Burkhardt , Wilfried Nisch
- 申请人: Claus Burkhardt , Wilfried Nisch
- 优先权: DE10344643.5 20030917
- 主分类号: G21K7/00
- IPC分类号: G21K7/00
摘要:
In a method for preparing a sample for electron microscopic examinations, in particular with a transmission electron microscope (TEM), a) a substrate containing the sample to be prepared on a sample locus is provided in a vacuum chamber, b) a protective layer is applied onto a surface of the sample locus, c) the sample located under the protective layer is separated from the substrate by an ion beam, the protective layer acting as a mask, and d) in the vacuum chamber, the separated sample is removed from the substrate.
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