发明申请
US20060261270A1 Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor 有权
制备电子显微镜检查样品的方法,以及用于其的样品支架和运输支架

  • 专利标题: Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor
  • 专利标题(中): 制备电子显微镜检查样品的方法,以及用于其的样品支架和运输支架
  • 申请号: US11377495
    申请日: 2006-03-16
  • 公开(公告)号: US20060261270A1
    公开(公告)日: 2006-11-23
  • 发明人: Claus BurkhardtWilfried Nisch
  • 申请人: Claus BurkhardtWilfried Nisch
  • 优先权: DE10344643.5 20030917
  • 主分类号: G21K7/00
  • IPC分类号: G21K7/00
Method for preparing a sample for electron microscopic examinations, and sample supports and transport holders used therefor
摘要:
In a method for preparing a sample for electron microscopic examinations, in particular with a transmission electron microscope (TEM), a) a substrate containing the sample to be prepared on a sample locus is provided in a vacuum chamber, b) a protective layer is applied onto a surface of the sample locus, c) the sample located under the protective layer is separated from the substrate by an ion beam, the protective layer acting as a mask, and d) in the vacuum chamber, the separated sample is removed from the substrate.
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